PIEZOELECTRIC LINEAR ACTUATOR
- Maximum generating force:
800N to 19000N - Maximum stroke:
22µm to 110µm - High accuracy positioning control
AVAILABLE FOR HIGH-PRECISION POSITIONING CONTROL
The PZ series of piezo actuators are linear actuators that enable highly accurate positioning control. There are 40 models with different strokes and forces, making them suitable for a wide range of applications. This series is equipped with a strain sensor (strain gauge), enabling high-precision displacement control. In addition, the metal package provides excellent environmental resistance. It can be easily introduced when combined with our piezo controller (piezo driver).
FEATURES AND BENEFITS
- Possible to high accuracy displacement control with strain sensor (strain gauge) mounted
(prepared models without strain sensor (strain gauge) as option) - Excellent environmentally resistant with metallic package
- Wide 40 models with different strokes and forces
APPLICATIONS
- Microscopy and imaging
- Semiconductor manufacturing
- Optical systems alignment
- Precision machining and micromachining Piezo applications
REFERENCE DATA
Case that max. impressed voltage is loaded on PZ12-32.
Hysteresis is 10% to 15%
Models
Displacement in ( ) are values for closed-loop control with our PZJ- 0.12BS series.
| Model | Case Length | Capacitance | Displacement | ΦF (outside diameter)*1 |
|---|---|---|---|---|
| PZ12-32 | 32 mm | 1.4 µF | 22 µm(15 µm) | 12 mm |
| PZ12-52 | 52 mm | 2.8 µF | 44 µm(30 µm) | |
| PZ12-72 | 72 mm | 4.2 µF | 66 µm(45 µm) | |
| PZ12-92 | 92 mm | 5.6 µF | 88 µm(60 µm) | |
| PZ12-112 | 112 mm | 7 µF | 110 µm(75 µm) |
| Model | Case Length | Capacitance | Displacement | ΦF (outside diameter)*1 |
|---|---|---|---|---|
| PZ20-45 | 45 mm | 5.4 µF | 22 µm(15 µm) | 20 mm |
| PZ20-65 | 65 mm | 10.8 µF | 44 µm(30 µm) | |
| PZ20-85 | 85 mm | 16.2 µF | 66 µm(45 µm) | |
| PZ20-105 | 105 mm | 21.6 µF | 88 µm(60 µm) | |
| PZ20-125 | 125 mm | 27.0 µF | 110 µm(75 µm) |
| Model | Case Length | Capacitance | Displacement | ΦF (outside diameter)*1 |
|---|---|---|---|---|
| PZ28-45 | 45 mm | 11 µF | 22 µm(15 µm) | 28 mm |
| PZ28-65 | 65 mm | 22 µF | 44 µm(30 µm) | |
| PZ28-85 | 85 mm | 33 µF | 66 µm(45 µm) | |
| PZ28-105 | 105 mm | 44 µF | 88 µm(60 µm) | |
| PZ28-125 | 125 mm | 55 µF | 110 µm(75 µm) |
| Model | Case Length | Capacitance | Displacement | ΦF (outside diameter)*1 |
|---|---|---|---|---|
| PZ45-45 | 45 mm | 30 µF | 22 µm(15 µm) | 45 mm |
| PZ45-65 | 65 mm | 60 µF | 44 µm(30 µm) | |
| PZ45-85 | 85 mm | 90 µF | 66 µm(45 µm) | |
| PZ45-105 | 105 mm | 120 µF | 88 µm(60 µm) | |
| PZ45-125 | 125 mm | 150 µF | 110 µm(75 µm) |
*1 Tolerance: ±0.05 mm, ±20% for capacitance.
Specifications
Options
- B
-
Ball "Adapter" (mounted on tapped screw on the top)
Shape PZ12 PZ20 PZ28 PZ45 K SR5 SR17 SR25 SR25
- N
-
No strain sensor (strain gauge).
- (BNC)
-
connector for control cable.
How to Order
When ordering, add Option No. in the following order by the shape of the top piece, with or without strain sensor (strain gauge), and connector to Model No.
<Example> PZ12-32BN(BNC)
ADDITIONAL PRODUCTS
- Extension cable
-
Extension cables up to 4 meters are available. Depending on whether the piezo actuator has a strain sensor, two types of extension cables are available. With a strain sensor, the set consists of a control cable and a sensor cable. Without a strain sensor, only the control cable is used. You can also change the control cable to BNC by specifying the connector. Cable length can be specified in 1-meter increments.
-
Cable type
• PZ extension cable: with strain sensor (set of control cable and sensor cable)
• PZN extension cable: without strain sensor (control cable only) -
Connector type (control cable only)
• Not specified: LEMO socket - LEMO plug
• LB: LEMO socket - BNC plug (male)
• BB: BNC jack (female) - BNC plug (male) -
Cable length
• (1): 1 meter
• (2): 2 meters
• (3): 3 meters
• (4): 4 meters
How to Order
When ordering, add specify the cable type, and connector specification (cable length) to Model No.
<Example> PZ extension cable (4): with strain sensor cable, LEMO connectors at both ends, cable length 4-meters
PZN extension cable LB (2): without strain sensor cable, BNC connector on one side, cable length 2-meters
Dimensions
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-
PZ series Datasheet
Date: 2024-09-02 rev.03
PDF (1,206 KB)
-
Piezoelectric products Selection Guide
Date: 2024-09-04 rev.20
PDF (3,347 KB)
Login Required
-
PZ series Datasheet
Date: 2024-09-02 rev.03
PDF (1,206 KB)
-
Piezoelectric products Selection Guide
Date: 2024-09-04 rev.20
PDF (3,347 KB)
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