HIGH VOLTAGE POWER SUPPLY FOR ION BEAM, ION GUN
- +10 to +60 kV accelerator voltage
- Selectable each floating channel output
- Voltage range: 60 kV
- Current: 5 A
Multi-output high voltage power supply for ion beam, ion gun
Electron beam power supply, Acceleration voltage: -10 kV to -60 kV, each channel can be selected individually
FEATURES AND BENEFITS
- Designed for FIB, integrated high voltage power supply with multiple outputs of ion gun in the accelerator, filament, suppressor, extractor, and lens
- Selectable the best electrode power supply for your ion gun
- Ultra low ripple and high stability
- Low-temperature coefficient. (25 ppm/°C and 10 ppm/°C is optionally available)
- Floating level (4 ch PS programmable with Vmon and Imon for each channel)
- Ground level (1ch PS programmable with Vmon and Imon)
- Controllable via RS-232C, RS-485, GPIB and USB.
- Maximum acceleration voltage 100kV available on request
- Additional ground-referenced voltage channels on request
- Other options available than listed below
APPLICATIONS
- Focused Ion Beam (FIB)
- Particle accelerator
- Ion implantation equipmet
- Ion gun
Models
| Model | Ch.Name | Reference level | Output | |
|---|---|---|---|---|
| Voltage | Current | |||
| HIB series | Filament | Accelerator | +2 V, +5 V, +6 V, +8 V | 3 A, 5 A |
| Suppressor | Accelerator | -300 V, -600 V, -1 kV, -2 kV | 50 µA, 100 µA | |
| Extractor | Accelerator | -10 kV, -12 kV, -15 kV | 500 µA | |
| Lens1 | Accelerator | +15 kV, +10 kV, +5 kV, -5 kV, -10 kV, -15 kV | 50 µA | |
| Accelerator | Ground | +10 kV, +15kV, +30 kV, +40kV, +50 kV, +60 kV | 100 µA, 250 µA, 300 µA, 500 µA, 700 µA, 750 µA | |
| Lens2 | Ground | -30 kV, +30 kV | 50 µA | |
| Lens3 | Ground | -30 kV, +30 kV | 50 µA | |
Select voltage according to your ion beam.
Specifications
Options
- -LFC
- Filament (ch1) center common
Dimensions
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-
HIB series Datasheet
Date: 2023-07-28 rev.04
PDF (1,020 KB)
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
-
High Performance High Voltage Power Supplies
Date: 2023-10-06 rev. 12
PDF (3,886 KB)
Login Required
-
HIB series Datasheet
Date: 2023-07-28 rev.04
PDF (1,020 KB)
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
-
High Performance High Voltage Power Supplies
Date: 2023-10-06 rev. 12
PDF (3,886 KB)
In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.
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