HIGHLY STABLE OUTPUT HIGH VOLTAGE POWER SUPPLY
- Voltage range: 5 to 30 kV
- Current: 0.5 to 6 mA
- Power: 15 to 30 W
SEM, Semiconductor Inspection System Power Supply
AESS series high voltage power supply offers ultra-high performance featuring ultra-low ripple, low-temperature coefficient, and high stability.
Using the expert know-how and state-of-the-art technology cultivated over Matsusada's 30 years of history, the AESS series achieved world-class performance.
Furthermore, in terms of functionality, this high-performance power supply is equipped with a voltage/current monitor as standard, and digital control via RS-232C is also realized using the attached optical fiber cable and optical isolation converter.
FEATURES AND BENEFITS
- Ultra low ripple and High stability
- Low temperature coefficient, 25 ppm/°C (below 10 ppm/°C model is available)
- With voltage and current monitor
- Remote control via isolated Opto-RS232C converter
APPLICATIONS
- Semiconductor Fabrication Equipment
- Scanning Electron Microscope (SEM)
- Critical Dimension Scanning Electron Microscope (CD-SEM)
- Electron Beam Lithography (EBL)
- Focused Ion Beam (FIB)
- Surface analysis instruments
- AES (Auger Electron Spectroscopy)
Models
Model | Output | ||
---|---|---|---|
Voltage [kV] | Current [mA] | Ripple [mVp-p] | |
AESS-5P3 | 5 kV | 3 mA | 10 mVp-p |
AESS-5P6 | 6 mA | 10 mVp-p | |
AESS-10P1.5 | 10 kV | 1.5 mA | 20 mVp-p |
AESS-10P3 | 3 mA | 20 mVp-p | |
AESS-15P1 | 15 kV | 1 mA | 30 mVp-p |
AESS-15P2 | 2 mA | 30 mVp-p | |
AESS-30P0.5 | 30 kV | 0.5 mA | 50 mVp-p |
AESS-30P1 | 1 mA | 50 mVp-p |
Model | Output | ||
---|---|---|---|
Voltage [kV] | Current [mA] | Ripple [mVp-p] | |
AESS-5N3 | -5 kV | 3 mA | 10 mVp-p |
AESS-5N6 | 6 mA | 10 mVp-p | |
AESS-10N1.5 | -10 kV | 1.5 mA | 20 mVp-p |
AESS-10N3 | 3 mA | 20 mVp-p | |
AESS-15N1 | -15 kV | 1 mA | 30 mVp-p |
AESS-15N2 | 2 mA | 30 mVp-p | |
AESS-30N0.5 | -30 kV | 0.5 mA | 50 mVp-p |
AESS-30N1 | 1 mA | 50 mVp-p |
Specifications
Dimensions
Accessories
- Application software for power supplies and electronic loads
-
PSS2en series
PSS2en is the dedicated software that can actuate various power supplies, electronic loads, and digital controllers for power supplies manufactured by Matsusada Precision Inc. with a simple setup.
It is the perfect for the aging test, the burn-in test and the withstand voltage test for electronic parts, and for the endurance test, intermittent/continuous operation test or various simulation test for electric component of automobile.
For details, refer to PSS2en page.
Download
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-
AESS series Datasheet
Date: 2024-08-07 rev.09
PDF (888 KB)
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
-
High Performance High Voltage Power Supplies
Date: 2023-10-06 rev. 12
PDF (3,886 KB)
Login Required
-
AESS series Datasheet
Date: 2024-08-07 rev.09
PDF (888 KB)
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
-
High Performance High Voltage Power Supplies
Date: 2023-10-06 rev. 12
PDF (3,886 KB)
In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.
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