HIGH VOLTAGE POWER SUPPLY WITH HIGHLY STABLE OUTPUT
- Voltage range: 5 to 30 kV
- Current: 0.5 to 6 mA
- Power: 15 to 30 W
High Voltage Power Supply for SEM and Semiconductor Inspection
The AESS series consists of rack-mount high-voltage power supplies engineered specifically for scanning electron microscopes (SEM) and semiconductor inspection systems. Designed for applications requiring critical precision, the series delivers ultra-low ripple, a low temperature coefficient, and exceptional output stability.
Standard features include integrated voltage and current monitors for real-time output observation. Additionally, the unit supports digital remote control via RS-232C using the included optical fiber cable and isolation adapter, ensuring noise immunity and safe operation.
FEATURES AND BENEFITS
- Ultra-low ripple and high stability: Optimized for high-resolution imaging and precision measurements.
- Low temperature coefficient: Standard models feature 25 ppm/°C (High-stability options with 10 ppm/°C or less are available).
- Integrated monitoring: Equipped with output voltage and current monitors.
- Digital control: Remote control capability via an optically isolated RS-232C converter (included).
APPLICATIONS
- Semiconductor Fabrication Equipment
- Scanning Electron Microscope (SEM)
- CD-SEM (Critical Dimension Scanning Electron Microscope)
- Electron Beam Lithography (EBL)
- Focused Ion Beam (FIB)
- Surface analysis instruments
- Auger Electron Spectroscopy (AES)
Models
| Model | Output | ||
|---|---|---|---|
| Voltage [kV] | Current [mA] | Ripple [mVp-p] | |
| AESS-5P3 | 5 kV | 3 mA | 10 mVp-p |
| AESS-5P6 | 6 mA | 10 mVp-p | |
| AESS-10P1.5 | 10 kV | 1.5 mA | 20 mVp-p |
| AESS-10P3 | 3 mA | 20 mVp-p | |
| AESS-15P1 | 15 kV | 1 mA | 30 mVp-p |
| AESS-15P2 | 2 mA | 30 mVp-p | |
| AESS-30P0.5 | 30 kV | 0.5 mA | 50 mVp-p |
| AESS-30P1 | 1 mA | 50 mVp-p | |
| Model | Output | ||
|---|---|---|---|
| Voltage [kV] | Current [mA] | Ripple [mVp-p] | |
| AESS-5N3 | -5 kV | 3 mA | 10 mVp-p |
| AESS-5N6 | 6 mA | 10 mVp-p | |
| AESS-10N1.5 | -10 kV | 1.5 mA | 20 mVp-p |
| AESS-10N3 | 3 mA | 20 mVp-p | |
| AESS-15N1 | -15 kV | 1 mA | 30 mVp-p |
| AESS-15N2 | 2 mA | 30 mVp-p | |
| AESS-30N0.5 | -30 kV | 0.5 mA | 50 mVp-p |
| AESS-30N1 | 1 mA | 50 mVp-p | |
Specifications
- Input voltage
- 85 to 264 Vac, 50/60 Hz, Single-phase
- Output voltage control
-
[Local] Rotary encoder on front panel
[Analog remote] External control voltage 0 to 10 Vdc
[Digital remote] Command
Dimensions
Accessories
- Application software
-
PSS2en series: Power Supply Control and Data Logging Software
Click here for the PSS2en seriesThe PSS2en software allows users to control and manage various Matsusada Precision DC power supplies, electronic loads, and digital controllers with ease. It enables sequence operation and data logging without the need for complex programming.
This software is an ideal choice for reliability testing, including aging, burn-in, and withstand voltage tests for electronic components. It also supports endurance testing and intermittent/continuous operation cycles for automotive electrical components.
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-
AESS series Datasheet
Date: 2024-08-07 rev.09
PDF (888 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
High Performance High Voltage Power Supplies
Date: 2023-10-06 rev. 12
PDF (3,886 KB)
Login Required
-
AESS series Datasheet
Date: 2024-08-07 rev.09
PDF (888 KB)
-
Safety and Usage of High voltage Power supply
Date: 2025-09-08 rev 04
PDF (602 KB)
-
High Performance High Voltage Power Supplies
Date: 2023-10-06 rev. 12
PDF (3,886 KB)
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