ECUB series is no longer available as we have stopped the production and sales of this model in August 2022. Meanwhile, we support. HECD series is available as the successor model, and more information on the series can be found here.
HECD series+ and -, 2ch Unit Reversible type
ECUB Series is designed particularly for E-Chuck application. Smooth chuck and de-chuck are possible with output ON/OFF or polarity reverse function.
Features and Benefits
- Designed for Electrostatic Chuck (E-chuck) application
- + and -, 2 outputs type
- Output reversible function for smooth release
Main application
Models
| Models | Maximum Output | |
|---|---|---|
| Voltage [kV] | Current [mA] | |
| ECUB-1PN2.5 (R) | 0 to ±1 kV | 2.5 mA |
| ECUB-2PN1.2 (R) | 0 to ±2 kV | 1.2 mA |
| ECUB-4PN0.6 (R) | 0 to ±4 kV | 0.6 mA |
| ECUB-6PN0.4 (R) | 0 to ±6 kV | 0.4 mA |
Specifications
Options
-LCt: Center tap
-LFg: Forced grounding
How to Order
- When ordering, add Option No. to Model No. in alphabetical, order.
-
- Example:
- ECUB-1PN2.5(R)-LCtFg
Cable
Output cable (Accessories)
- CN-SHV-HVPP (5)
- with SHV connector on both ends
-
Dimensions
Download
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-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2023-07-27 rev. 10
PDF (4,459 KB)
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
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-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2023-07-27 rev. 10
PDF (4,459 KB)
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.
