NEW
ELECTROSTATIC CHUCK POWER SUPPLY
Wafer Sensor adopted
- Max Voltage：±0.5 to ±7.5 kV
- Max Current: 1 to 20mA
- Two-channel output type
- Half rack size compact design
Two channels, reversible, floating, programmable high voltage power supply for electrostatic chuck drivers.
HECD series is a two-channel, reversible, floating, programmable high voltage power supply for electrostatic chuck drivers. In addition to the polarity switching and forced grounding, the series offers a wafer monitoring system to satisfy wafer detection needs. Furthermore, with the wide range of voltages, this series can support both coulombic and Johnsen-Rahbek electrostatic chucks.
FEATURES AND BENEFITS
- Half rack size compact design
- Polarity reverse enabling increased throughput with quick dechucking
- Reliability chucking/dechucking status detection by wafer sensor
- Fast response by amplifier architecture design (high reliability and long life by "non-relay polarity reverse" design.)
- "Two-channel independent controls (option)" and "Output using center tap (option)" for various chuck/dechuck operations
- Digital interface with LAN, USB, RS-232C, or Ether CAT (option）
- Built-in RF filter (13.56 MHz)
- Selectable models for wafer size and your applications
- OEM available (4-ch, 6-ch, digital communication, another output power)
APPLICATIONS
- Electrostatic Chuck (E-Chuck, ESC)
- Semiconductor Fabrication Equipment
- Photolithography
- Chemical vapor Deposition (CVD)
- Plasma Enhanced CVD (PECVD)
- Semiconductor wafer handling
- Flat panel handling
- Dry etching
- Plasma etching
- Reactive-ion etching (RIE)
Models
| Model | Output | Output Response speed [typ] (－90%⇔+90%*2) |
|
|---|---|---|---|
| Voltage Max*1 (each channel) |
Current (each channel) |
||
| HECD-0.5B20×2 | +0.5kV, -0.5kV | 20 mA | 10 ms |
| HECD-1B10×2 | +1kV, -1kV | 10 mA | 10 ms |
| HECD-1.5B6×2 | +1.5kV, -1.5kV | 6 mA | 15 ms |
| HECD-2B5×2 | +2kV, -2kV | 5 mA | 20 ms |
| HECD-4B1×2 | +4kV, -4kV | 1 mA | 40 ms |
| HECD-4B2.5×2 | +4kV, -4kV | 2.5 mA | 40 ms |
| HECD-5B2×2 | +5kV, -5kV | 2 mA | 60 ms |
| HECD-7.5B1.2×2 | +7.5kV, -7.5kV | 1.2 mA | 90 ms |
- Include center tap voltage and bias voltage.
- Typical value at operation with no load.
- Discontinued Products
-
Sales of the following models ended on March 2022. We continue to support the products.
Model Output Successor Voltage Current HECD-0.5B10×2 +0.5kV, -0.5kV 10 mA HECD-0.5B20×2 HECD-1B3×2 +1kV, -1kV 3 mA HECD-1B10×2 HECD-1.5B2×2 +1.5kV, -1.5kV 2 mA HECD-1.5B6×2 HECD-2B3×2 +2kV, -2kV 3 mA HECD-2B5×2
Specification
For details, download the datasheet below.
CHARACTERISTIC OF OUTPUT VOLTAGE SETTING
EXAMPLE OF WAVEFORM
Options
- -LCm
-
Additional high-sensitivity current monitor (each Ch)
0 to +10 V / −1/100 of rated output current to +1/100 of rated output current
- -LCt
-
Center tap bias
The bias setting range is from 0 to ± rated voltage.
However, the maximum output voltage remains the same as the rated voltage.
- -LEc
-
Ether CAT interface
(LAN, USB, or RS-232C is unavailable.)
- -LSep
-
Two-channel independent controls
- -L(AC)
-
AC 100 V to 240 V, 1 Øinput
- -L(7m)
-
Output High Voltage cable 7meters x 3
(2pcs when -LCt or -LSep is selected)
- -LCt and -LSep can not select together.
- -LCt and -LSep has no center tap terminal.
How to Order
To order, add Option No. to Model No. in alphabetic order followed by cable No.
Example: HECD-4B1×2-LSep(AC)(7m)
ACCESSORYS
|
Standard 0.5 kV to 5 kV model |
CN-SHV-HVPP(5) (with SHV connector on both end) |
 |
5 meters *When -L(7m) option is selected, CN-SHV-HVPP(7) is applied. |
|---|---|---|---|
|
Standard 7.5 kV model |
CN-SHV7.5-HVPP(5) (with SHV connector on both end) |
|
5 meters |
Dimensions
Download
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-
HECD series Datasheet
Date: 2024-11-19 rev.12
PDF (1,807 KB)
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2023-07-27 rev. 10
PDF (4,459 KB)
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
-
HECD series Instruction Manual
Date: 2024-6-5 rev 0.8
PDF (1,767 KB)
-
HECD series Basic Instruction Manual (Both Japanese and English)
Date: 2024-10-7 rev 0.0
PDF (800 KB)
Login Required
-
HECD series Datasheet
Date: 2024-11-19 rev.12
PDF (1,807 KB)
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2023-07-27 rev. 10
PDF (4,459 KB)
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
-
HECD series Instruction Manual
Date: 2024-6-5 rev 0.8
PDF (1,767 KB)
-
HECD series Basic Instruction Manual (Both Japanese and English)
Date: 2024-10-7 rev 0.0
PDF (800 KB)
In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.
