E-Chuck High Voltage Power Supply
positive/negative Bipolar high-voltage output, 2 channel Unit type
- ±0.5kV to ±5kV
- 2W to 10W
- ±500V lineup
- RF filter as standard
COMPACT HIGH VOLTAGE POWER SUPPLY FOR E-CHUCK APPLICATION
The Matsusada Precision ECU series is a compact high voltage power supply designed specifically for electrostatic chuck (E-Chuck) applications. It offers dual-channel outputs with voltages ranging from ±0.5kV to ±5kV and power ratings from 2W to 10W. Key features include output reversibility, grounding function for smooth release, integrated RF filter, and multiple control options (local, remote, or RS-232C). The series is available in various models with different voltage and current specifications. It's equipped with output ON/OFF and polarity reverse functions for smooth chuck and de-chuck operations. The ECU series is ideal for applications requiring precise control of electrostatic chucks in semiconductor manufacturing and research environments.
FEATURES AND BENEFITS
- Designed for Electrostatic Chuck (E-Chuck, ESC) application
- + and -, 2 outputs type
- Output reversible and grounding function for smooth release
- RF filter integrated
- Local, Remote, or RS-232C control
MAIN APPLICATION
Models
More high voltage models are available. Contact nearby sales office.
| Models | Maximum Output | |
|---|---|---|
| Voltage [kV] | Current [mA] | |
| ECU-0.5PN10 (R) | 0 to ±0.5 kV | 10 mA |
| ECU-1PN3 (R) | 0 to ±1 kV | 3 mA |
| ECU-1.5PN2 (R) | 0 to ±1.5 kV | 2 mA |
| ECU-2PN1 (R) | 0 to ±2 kV | 1 mA |
| ECU-2PN3 (R) | 0 to ±2 kV | 3 mA |
| ECU-4PN1 (R) | 0 to ±4 kV | 1 mA |
| ECU-5PN2 (R) | 0 to ±5 kV | 2 mA |
Specifications
For details, download the datasheet below.
Example of waveform
Character of output voltage setting
Options
- -L(7m)
-
Output High Voltage cable with HV-BNC connector on both ends 7 m x 2
How to Order
When ordering, add Option No. to Model No.
Example: ECU-0.5PN10(R) -L(7m)
Accessories
| Standard | CN-BNC-HVPP(5) * |  MHV connector on both end |
5 meters (Specified length available) |
|---|
*: Standard is "(5)". It will be "(7)" when selected -L(7m) option.
Dimensions
Download
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High voltage power supply especially for E-Chuck Selection Guide
Date: 2023-07-27 rev. 10
PDF (4,459 KB)
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
-
ECU series Instruction Manual
PDF (707 KB)
Login Required
-
High voltage power supply especially for E-Chuck Selection Guide
Date: 2023-07-27 rev. 10
PDF (4,459 KB)
-
Safety and Usage of High voltage Power supply
Date: 2023-07-27 rev. 03
PDF (602 KB)
-
ECU series Instruction Manual
PDF (707 KB)
In this website, we provide only the latest version of information including instruction manuals as of our products. Therefore, the newest versions of manuals on the website might be not same as the ones of products you purchased in the past.
