Electrostatic Chuck Power Supplies
Electrostatic chuck power supplies, E-Chuck power supplies or ESC supplies are high-voltage power supplies specialized for electrostatic chucks(E-chuck, ESC). Matsusada Precision offers a wide range of high-voltage power supply series for electrostatic chucks. Based on customer feedback, we recognized a considerable need for smooth and reliable chucking and wafer release in the Semiconductor and R&D marketplaces. A wide range of models is available, including single polar type, bipolar type, dual tracking type, generic and multi-purpose type, and compact module type, which will be required for wafers and LCD glass substrates. We can also provide OEM and custom power supplies for semiconductor manufacturing equipment.
