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Physical Vapor Deposition (PVD), also known as PVD, is a method of depositing thin films on semiconductor manufacturing processes, cutting tools, and molds. Other deposition methods include resistive vapor deposition, electron beam deposition, molecular beam epitaxy, ion plating, ion beam deposition, and sputtering.

Matsusada Precision manufactures and sells power supplies for PVD and other vapor deposition systems.

Recommended products

RK series

RK series

voltage range
6 to 800 V
current
0.6 to 180 A
power
385 to 1200 W
Versatile benchtop
DC power supply

Available for 400 W output while being the small size of only 2.8-inch in width.

RE series

RE series

voltage range
10 to 650 V
current
1.2 to 1200 A
power
0.75 to 15 kW
147 models, programmable DC Power Supply

Low noise, High power, compact and high efficiency

REK/REKJ series

REK/REKJ series

voltage range
6 to 1500 V
current
1.2 to 1200 A
power
0.77 to 15 kW
Versatile, High-performance
DC power supply

Compact and High power, PFC circuit and universal input. Various operations are available

PRT series

PRT series

voltage range
80 to 1500 V
current
33 to 510 A
power
5 to 15 kW
High Power Autoranging DC Power Supply

Achieve a autoranging of output, Variable internal resistance function

R4G/R4GN series

R4G/R4GN series

voltage range
6 to 650 V
current
0.1 to 10 A
power
12 to 180 W
Compact and High resolution
Linear DC power supply

High resolution and Ultra low noise, Digital interface

AU series

AU series

voltage range
1 to 120 kV
current
0.25 to 2200 mA
power
30 to 2200 W
Rack mount High Voltage DC Power Supply

Choose from over 300 available models of the low-profile, lightweight design from the AU series, offering remote control & monitor functions; digital interface available.

REH series

REH series

voltage range
0.75 to 1.2 kV
current
1.1 to 20 A
power
1.1 to 15 kW
Max 1.2 kV high voltage and high power
DC Power Supply

Safety design, Outstanding small size in its class of 1kV/15kW

AK series

AK series

voltage range
1 to 120 kV
current
25 to 4250 mA
power
3 to 6.4 kW
High power 6.4 kW/Compact
High Voltage Power Supply

Browse over 100 available models of the AK series, with high power 6.4 kW/Compact. 6.4 kW in 4 U. Digital interface is available.

AKP series

AKP series

voltage range
1 to 120 kV
current
0.1 to 13 A
power
12 to 13 kW
High-voltage High-current power supply

Further optimize extension up to 52kW with the AKP series’ propriety master/slave function.