Electron Beam (E-Beam) Evaporation

Electron Beam (E-Beam) Evaporation is a thin film fabrication technique called Electron-beam Physical Vapor Deposition, or EBPVD. An electron beam generated from a filament is irradiated onto a deposition material (target). The target vaporizes and is deposited on the substrate (base material). A high acceleration voltage of 30-40 kV is used for the electron beam.

Matsusada Precision manufactures and sells power supplies for electron beam acceleration and filaments.

Recommended products

AU series

voltage range

1 to 120 kV

current

0.25 to 2200 mA

power

30 to 2200 W

Rack mount High Voltage DC Power Supply

Choose from over 300 available models of the low-profile, lightweight design from the AU series, offering remote control & monitor functions; digital interface available.

AK series

voltage range

1 to 120 kV

current

25 to 4250 mA

power

3 to 6.4 kW

High power 6.4 kW/Compact
High Voltage Power Supply

Browse over 100 available models of the AK series, with high power 6.4 kW/Compact. 6.4 kW in 4 U. Digital interface is available.

AKP series

voltage range

1 to 120 kV

current

0.1 to 13 A

power

12 to 13 kW

High-voltage High-current power supply

Further optimize extension up to 52kW with the AKP series’ propriety master/slave function.

HEB series

voltage range

-60 kV

current

5 A

Electron Beam Power Supply

The multifunctional HEB series provides an excellent temperature coefficient suitable for many applications.

RK series

voltage range

6 to 800 V

current

0.6 to 180 A

power

385 to 1200 W

Versatile benchtop
DC power supply

Available for 400 W output while being the small size of only 2.8-inch in width.

TB series

voltage range

35 to 1000 V

current

1 to 108 A

power

360W, 720W, 1080W

Wide range programmable
DC power supply

"Turbo function" installed, Compact, Suppressing voltage/current overshoot

REK/REKJ series

voltage range

6 to 1500 V

current

1.2 to 1200 A

power

0.77 to 15 kW

Versatile, High-performance
DC power supply

Compact and High power, PFC circuit and universal input. Various operations are available

PRT series

voltage range

80 to 1500 V

current

33 to 510 A

power

5 to 15 kW

High Power Autoranging DC Power Supply

Achieve a autoranging of output, Variable internal resistance function